GlobalFoundries collaborates with IME for MEMS

GlobalFoundries has announced a partnership with The Institute of Microelectronics (IME) in Singapore to develop MEMS Capacitive Sensor Platform Technology with the aim of creating power-efficient and highly sensitive motion sensing applications.

IME, a research institute of the Agency for Science, Technology and Research (A*STAR), and semiconductor manufacturer GlobalFoundries made the announcement that they will be collaborating on research into MEMS technology that will be used in the automotive, aerospace and consumer electronics industries.

The MEMS capacitive sensor technology is increasingly common in consumer electronics, performing a role in the way that users interact with mobile communication devices and 3D virtual media gaming systems.

The deal will see GlobalFoundries becoming responsible for the preliminary platform design specifications and process flow. IME’s role will be to focus on the development of a modular and scalable capacitive sensor technology platform with standardised process modules and process integration scheme that is based its own advanced MEMS fabrication facilities and tools.

It is thought that IME’s multi wafers bonding technology will be a key part of the joint project which will see the two firms aim to grab a slice of an industry that will be worth an estimated $16 billion by 2015.